8/20/2011	8:18:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2011	8:18:53 AM	Recipe started at 8:18 AM
8/20/2011	8:18:53 AM	Helium valve closed
8/20/2011	8:18:53 AM	H2 valve closed
8/20/2011	8:18:53 AM	BCl3 valve closed
8/20/2011	8:18:53 AM	PH3 valve closed
8/20/2011	8:18:53 AM	SiCl4 pre valve closed
8/20/2011	8:18:53 AM	SiCl4 post valve closed
8/20/2011	8:18:53 AM	Main Vac valve closed
8/20/2011	8:18:53 AM	Bypass valve closed
8/20/2011	8:18:53 AM	Bubbler valve closed
8/20/2011	8:18:53 AM	Helium MFC set to  0.000000
8/20/2011	8:18:53 AM	H2 MFC set to  0.000000
8/20/2011	8:18:53 AM	BCl3 MFC set to  0.000000
8/20/2011	8:18:53 AM	PHl3 MFC set to  0.000000
8/20/2011	8:18:53 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:18:53 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:18:53 AM	Tube furnace set to 0
8/20/2011	8:18:56 AM	H2 valve closed
8/20/2011	8:18:56 AM	BCl3 valve closed
8/20/2011	8:18:56 AM	PH3 valve closed
8/20/2011	8:18:56 AM	SiCl4 pre valve closed
8/20/2011	8:18:56 AM	SiCl4 post valve closed
8/20/2011	8:18:56 AM	Main Vac valve closed
8/20/2011	8:18:56 AM	Bypass valve closed
8/20/2011	8:18:56 AM	Bubbler valve closed
8/20/2011	8:18:56 AM	Helium valve opened
8/20/2011	8:18:56 AM	Helium MFC set to  500.000000
8/20/2011	8:18:56 AM	H2 MFC set to  0.000000
8/20/2011	8:18:56 AM	BCl3 MFC set to  0.000000
8/20/2011	8:18:56 AM	PHl3 MFC set to  0.000000
8/20/2011	8:18:56 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:18:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:18:56 AM	Tube furnace set to 0
8/20/2011	8:20:01 AM	Helium valve closed
8/20/2011	8:20:01 AM	H2 valve closed
8/20/2011	8:20:01 AM	BCl3 valve closed
8/20/2011	8:20:01 AM	PH3 valve closed
8/20/2011	8:20:01 AM	SiCl4 pre valve closed
8/20/2011	8:20:01 AM	SiCl4 post valve closed
8/20/2011	8:20:01 AM	Main Vac valve closed
8/20/2011	8:20:01 AM	Bypass valve closed
8/20/2011	8:20:01 AM	Bubbler valve closed
8/20/2011	8:20:01 AM	Helium MFC set to  0.000000
8/20/2011	8:20:01 AM	H2 MFC set to  0.000000
8/20/2011	8:20:01 AM	BCl3 MFC set to  0.000000
8/20/2011	8:20:01 AM	PHl3 MFC set to  0.000000
8/20/2011	8:20:01 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:20:01 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:20:01 AM	Tube furnace set to 0
8/20/2011	8:20:02 AM	Run finished at 8:20 AM
8/20/2011	8:20:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2011	8:23:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2011	8:23:02 AM	Recipe started at 8:23 AM
8/20/2011	8:23:02 AM	Helium valve closed
8/20/2011	8:23:02 AM	H2 valve closed
8/20/2011	8:23:02 AM	BCl3 valve closed
8/20/2011	8:23:02 AM	PH3 valve closed
8/20/2011	8:23:02 AM	SiCl4 pre valve closed
8/20/2011	8:23:02 AM	SiCl4 post valve closed
8/20/2011	8:23:02 AM	Main Vac valve closed
8/20/2011	8:23:02 AM	Bubbler valve closed
8/20/2011	8:23:02 AM	Bypass valve opened
8/20/2011	8:23:02 AM	Helium MFC set to  0.000000
8/20/2011	8:23:02 AM	H2 MFC set to  0.000000
8/20/2011	8:23:02 AM	BCl3 MFC set to  0.000000
8/20/2011	8:23:02 AM	PHl3 MFC set to  0.000000
8/20/2011	8:23:02 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:23:02 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:23:02 AM	Tube furnace set to 0
8/20/2011	8:24:15 AM	Helium valve closed
8/20/2011	8:24:15 AM	H2 valve closed
8/20/2011	8:24:15 AM	BCl3 valve closed
8/20/2011	8:24:15 AM	PH3 valve closed
8/20/2011	8:24:15 AM	SiCl4 pre valve closed
8/20/2011	8:24:15 AM	SiCl4 post valve closed
8/20/2011	8:24:15 AM	Main Vac valve closed
8/20/2011	8:24:15 AM	Bubbler valve closed
8/20/2011	8:24:15 AM	Bypass valve opened
8/20/2011	8:24:15 AM	Helium MFC set to  0.000000
8/20/2011	8:24:15 AM	H2 MFC set to  0.000000
8/20/2011	8:24:15 AM	BCl3 MFC set to  0.000000
8/20/2011	8:24:15 AM	PHl3 MFC set to  0.000000
8/20/2011	8:24:15 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:24:15 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:24:15 AM	Tube furnace set to 0
8/20/2011	8:25:15 AM	Helium valve closed
8/20/2011	8:25:15 AM	H2 valve closed
8/20/2011	8:25:15 AM	BCl3 valve closed
8/20/2011	8:25:15 AM	PH3 valve closed
8/20/2011	8:25:15 AM	SiCl4 pre valve closed
8/20/2011	8:25:15 AM	SiCl4 post valve closed
8/20/2011	8:25:15 AM	Bypass valve closed
8/20/2011	8:25:15 AM	Bubbler valve closed
8/20/2011	8:25:15 AM	Main Vac valve opened
8/20/2011	8:25:15 AM	Helium MFC set to  0.000000
8/20/2011	8:25:15 AM	H2 MFC set to  0.000000
8/20/2011	8:25:15 AM	BCl3 MFC set to  0.000000
8/20/2011	8:25:15 AM	PHl3 MFC set to  0.000000
8/20/2011	8:25:15 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:25:15 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:25:15 AM	Tube furnace set to 0
8/20/2011	8:25:16 AM	Run finished at 8:25 AM
8/20/2011	8:25:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2011	8:27:20 AM	Recipe started at 8:27 AM
8/20/2011	8:27:20 AM	Helium valve closed
8/20/2011	8:27:20 AM	H2 valve closed
8/20/2011	8:27:20 AM	BCl3 valve closed
8/20/2011	8:27:20 AM	PH3 valve closed
8/20/2011	8:27:20 AM	SiCl4 pre valve closed
8/20/2011	8:27:20 AM	SiCl4 post valve closed
8/20/2011	8:27:20 AM	Main Vac valve closed
8/20/2011	8:27:20 AM	Bypass valve closed
8/20/2011	8:27:20 AM	Bubbler valve closed
8/20/2011	8:27:20 AM	Helium MFC set to  0.000000
8/20/2011	8:27:20 AM	H2 MFC set to  0.000000
8/20/2011	8:27:20 AM	BCl3 MFC set to  0.000000
8/20/2011	8:27:20 AM	PHl3 MFC set to  0.000000
8/20/2011	8:27:20 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:27:20 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:27:20 AM	Tube furnace set to 0
8/20/2011	8:27:23 AM	H2 valve closed
8/20/2011	8:27:23 AM	BCl3 valve closed
8/20/2011	8:27:23 AM	PH3 valve closed
8/20/2011	8:27:23 AM	SiCl4 pre valve closed
8/20/2011	8:27:23 AM	SiCl4 post valve closed
8/20/2011	8:27:23 AM	Main Vac valve closed
8/20/2011	8:27:23 AM	Bypass valve closed
8/20/2011	8:27:23 AM	Bubbler valve closed
8/20/2011	8:27:23 AM	Helium valve opened
8/20/2011	8:27:23 AM	Helium MFC set to  500.000000
8/20/2011	8:27:23 AM	H2 MFC set to  0.000000
8/20/2011	8:27:23 AM	BCl3 MFC set to  0.000000
8/20/2011	8:27:23 AM	PHl3 MFC set to  0.000000
8/20/2011	8:27:23 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:27:23 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:27:23 AM	Tube furnace set to 0
8/20/2011	8:28:31 AM	H2 valve closed
8/20/2011	8:28:31 AM	BCl3 valve closed
8/20/2011	8:28:31 AM	PH3 valve closed
8/20/2011	8:28:31 AM	SiCl4 pre valve closed
8/20/2011	8:28:31 AM	SiCl4 post valve closed
8/20/2011	8:28:31 AM	Main Vac valve closed
8/20/2011	8:28:31 AM	Bypass valve closed
8/20/2011	8:28:31 AM	Helium valve opened
8/20/2011	8:28:31 AM	Bubbler valve opened
8/20/2011	8:28:31 AM	Helium MFC set to  500.000000
8/20/2011	8:28:31 AM	H2 MFC set to  0.000000
8/20/2011	8:28:31 AM	BCl3 MFC set to  0.000000
8/20/2011	8:28:31 AM	PHl3 MFC set to  0.000000
8/20/2011	8:28:31 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:28:31 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:28:31 AM	Tube furnace set to 0
8/20/2011	8:29:01 AM	Helium valve closed
8/20/2011	8:29:01 AM	H2 valve closed
8/20/2011	8:29:01 AM	BCl3 valve closed
8/20/2011	8:29:01 AM	PH3 valve closed
8/20/2011	8:29:01 AM	SiCl4 pre valve closed
8/20/2011	8:29:01 AM	SiCl4 post valve closed
8/20/2011	8:29:01 AM	Main Vac valve closed
8/20/2011	8:29:01 AM	Bubbler valve closed
8/20/2011	8:29:01 AM	Bypass valve opened
8/20/2011	8:29:01 AM	Helium MFC set to  0.000000
8/20/2011	8:29:02 AM	H2 MFC set to  0.000000
8/20/2011	8:29:02 AM	BCl3 MFC set to  0.000000
8/20/2011	8:29:02 AM	PHl3 MFC set to  0.000000
8/20/2011	8:29:02 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:29:02 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:29:02 AM	Tube furnace set to 0
8/20/2011	8:29:56 AM	Helium valve closed
8/20/2011	8:29:56 AM	H2 valve closed
8/20/2011	8:29:56 AM	BCl3 valve closed
8/20/2011	8:29:56 AM	PH3 valve closed
8/20/2011	8:29:56 AM	SiCl4 pre valve closed
8/20/2011	8:29:56 AM	SiCl4 post valve closed
8/20/2011	8:29:56 AM	Main Vac valve closed
8/20/2011	8:29:56 AM	Bubbler valve closed
8/20/2011	8:29:56 AM	Bypass valve opened
8/20/2011	8:29:56 AM	Helium MFC set to  0.000000
8/20/2011	8:29:56 AM	H2 MFC set to  0.000000
8/20/2011	8:29:56 AM	BCl3 MFC set to  0.000000
8/20/2011	8:29:56 AM	PHl3 MFC set to  0.000000
8/20/2011	8:29:56 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:29:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:29:56 AM	Tube furnace set to 0
8/20/2011	8:30:56 AM	Helium valve closed
8/20/2011	8:30:56 AM	H2 valve closed
8/20/2011	8:30:56 AM	BCl3 valve closed
8/20/2011	8:30:56 AM	PH3 valve closed
8/20/2011	8:30:56 AM	SiCl4 pre valve closed
8/20/2011	8:30:56 AM	SiCl4 post valve closed
8/20/2011	8:30:56 AM	Bypass valve closed
8/20/2011	8:30:56 AM	Bubbler valve closed
8/20/2011	8:30:56 AM	Main Vac valve opened
8/20/2011	8:30:56 AM	Helium MFC set to  0.000000
8/20/2011	8:30:56 AM	H2 MFC set to  0.000000
8/20/2011	8:30:56 AM	BCl3 MFC set to  0.000000
8/20/2011	8:30:56 AM	PHl3 MFC set to  0.000000
8/20/2011	8:30:56 AM	SiCl4 MFC set to  0.000000
8/20/2011	8:30:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	8:30:56 AM	Tube furnace set to 0
8/20/2011	9:10:56 AM	Helium valve closed
8/20/2011	9:10:56 AM	H2 valve closed
8/20/2011	9:10:56 AM	BCl3 valve closed
8/20/2011	9:10:56 AM	PH3 valve closed
8/20/2011	9:10:56 AM	SiCl4 pre valve closed
8/20/2011	9:10:56 AM	SiCl4 post valve closed
8/20/2011	9:10:56 AM	Bypass valve closed
8/20/2011	9:10:56 AM	Bubbler valve closed
8/20/2011	9:10:56 AM	Main Vac valve opened
8/20/2011	9:10:56 AM	Helium MFC set to  0.000000
8/20/2011	9:10:56 AM	H2 MFC set to  0.000000
8/20/2011	9:10:56 AM	BCl3 MFC set to  0.000000
8/20/2011	9:10:56 AM	PHl3 MFC set to  0.000000
8/20/2011	9:10:56 AM	SiCl4 MFC set to  0.000000
8/20/2011	9:10:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:10:56 AM	Tube furnace set to 1000
8/20/2011	9:50:56 AM	Helium valve closed
8/20/2011	9:50:56 AM	BCl3 valve closed
8/20/2011	9:50:56 AM	PH3 valve closed
8/20/2011	9:50:56 AM	SiCl4 pre valve closed
8/20/2011	9:50:56 AM	SiCl4 post valve closed
8/20/2011	9:50:56 AM	Main Vac valve closed
8/20/2011	9:50:56 AM	Bypass valve closed
8/20/2011	9:50:56 AM	Bubbler valve closed
8/20/2011	9:50:56 AM	H2 valve opened
8/20/2011	9:50:56 AM	Helium MFC set to  0.000000
8/20/2011	9:50:56 AM	H2 MFC set to  500.000000
8/20/2011	9:50:56 AM	BCl3 MFC set to  0.000000
8/20/2011	9:50:56 AM	PHl3 MFC set to  0.000000
8/20/2011	9:50:56 AM	SiCl4 MFC set to  0.000000
8/20/2011	9:50:56 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:50:57 AM	Tube furnace set to 1000
8/20/2011	9:51:51 AM	Helium valve closed
8/20/2011	9:51:51 AM	BCl3 valve closed
8/20/2011	9:51:51 AM	PH3 valve closed
8/20/2011	9:51:51 AM	SiCl4 pre valve closed
8/20/2011	9:51:51 AM	SiCl4 post valve closed
8/20/2011	9:51:51 AM	Main Vac valve closed
8/20/2011	9:51:51 AM	Bypass valve closed
8/20/2011	9:51:51 AM	H2 valve opened
8/20/2011	9:51:51 AM	Bubbler valve opened
8/20/2011	9:51:51 AM	Helium MFC set to  0.000000
8/20/2011	9:51:51 AM	H2 MFC set to  500.000000
8/20/2011	9:51:51 AM	BCl3 MFC set to  0.000000
8/20/2011	9:51:51 AM	PHl3 MFC set to  0.000000
8/20/2011	9:51:51 AM	SiCl4 MFC set to  0.000000
8/20/2011	9:51:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:51:51 AM	Tube furnace set to 1000
8/20/2011	10:11:51 AM	Helium valve closed
8/20/2011	10:11:51 AM	PH3 valve closed
8/20/2011	10:11:51 AM	Main Vac valve closed
8/20/2011	10:11:51 AM	Bypass valve closed
8/20/2011	10:11:51 AM	H2 valve opened
8/20/2011	10:11:51 AM	BCl3 valve opened
8/20/2011	10:11:51 AM	SiCl4 pre valve opened
8/20/2011	10:11:51 AM	SiCl4 post valve opened
8/20/2011	10:11:51 AM	Bubbler valve opened
8/20/2011	10:11:51 AM	Helium MFC set to  0.000000
8/20/2011	10:11:51 AM	H2 MFC set to  500.000000
8/20/2011	10:11:51 AM	BCl3 MFC set to  2.500000
8/20/2011	10:11:51 AM	PHl3 MFC set to  0.000000
8/20/2011	10:11:51 AM	SiCl4 MFC set to  50.000000
8/20/2011	10:11:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:11:51 AM	Tube furnace set to 1000
8/20/2011	10:21:51 AM	Helium valve closed
8/20/2011	10:21:51 AM	BCl3 valve closed
8/20/2011	10:21:51 AM	PH3 valve closed
8/20/2011	10:21:51 AM	SiCl4 pre valve closed
8/20/2011	10:21:51 AM	SiCl4 post valve closed
8/20/2011	10:21:51 AM	Main Vac valve closed
8/20/2011	10:21:51 AM	Bypass valve closed
8/20/2011	10:21:51 AM	H2 valve opened
8/20/2011	10:21:51 AM	Bubbler valve opened
8/20/2011	10:21:51 AM	Helium MFC set to  0.000000
8/20/2011	10:21:51 AM	H2 MFC set to  500.000000
8/20/2011	10:21:51 AM	BCl3 MFC set to  0.000000
8/20/2011	10:21:51 AM	PHl3 MFC set to  0.000000
8/20/2011	10:21:51 AM	SiCl4 MFC set to  0.000000
8/20/2011	10:21:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:21:51 AM	Tube furnace set to 0
8/20/2011	10:26:51 AM	H2 valve closed
8/20/2011	10:26:51 AM	BCl3 valve closed
8/20/2011	10:26:51 AM	PH3 valve closed
8/20/2011	10:26:51 AM	SiCl4 pre valve closed
8/20/2011	10:26:51 AM	SiCl4 post valve closed
8/20/2011	10:26:51 AM	Main Vac valve closed
8/20/2011	10:26:51 AM	Bypass valve closed
8/20/2011	10:26:51 AM	Helium valve opened
8/20/2011	10:26:51 AM	Bubbler valve opened
8/20/2011	10:26:51 AM	Helium MFC set to  500.000000
8/20/2011	10:26:51 AM	H2 MFC set to  0.000000
8/20/2011	10:26:51 AM	BCl3 MFC set to  0.000000
8/20/2011	10:26:51 AM	PHl3 MFC set to  0.000000
8/20/2011	10:26:51 AM	SiCl4 MFC set to  0.000000
8/20/2011	10:26:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:26:51 AM	Tube furnace set to 0
8/20/2011	10:56:51 AM	Helium valve closed
8/20/2011	10:56:51 AM	H2 valve closed
8/20/2011	10:56:51 AM	BCl3 valve closed
8/20/2011	10:56:51 AM	PH3 valve closed
8/20/2011	10:56:51 AM	SiCl4 pre valve closed
8/20/2011	10:56:51 AM	SiCl4 post valve closed
8/20/2011	10:56:51 AM	Main Vac valve closed
8/20/2011	10:56:51 AM	Bypass valve closed
8/20/2011	10:56:51 AM	Bubbler valve closed
8/20/2011	10:56:51 AM	Helium MFC set to  0.000000
8/20/2011	10:56:51 AM	H2 MFC set to  0.000000
8/20/2011	10:56:51 AM	BCl3 MFC set to  0.000000
8/20/2011	10:56:51 AM	PHl3 MFC set to  0.000000
8/20/2011	10:56:51 AM	SiCl4 MFC set to  0.000000
8/20/2011	10:56:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:56:51 AM	Tube furnace set to 0
8/20/2011	11:26:51 AM	Helium valve closed
8/20/2011	11:26:51 AM	H2 valve closed
8/20/2011	11:26:51 AM	BCl3 valve closed
8/20/2011	11:26:51 AM	PH3 valve closed
8/20/2011	11:26:51 AM	SiCl4 pre valve closed
8/20/2011	11:26:51 AM	SiCl4 post valve closed
8/20/2011	11:26:51 AM	Main Vac valve closed
8/20/2011	11:26:51 AM	Bubbler valve closed
8/20/2011	11:26:51 AM	Bypass valve opened
8/20/2011	11:26:51 AM	Helium MFC set to  0.000000
8/20/2011	11:26:51 AM	H2 MFC set to  0.000000
8/20/2011	11:26:51 AM	BCl3 MFC set to  0.000000
8/20/2011	11:26:51 AM	PHl3 MFC set to  0.000000
8/20/2011	11:26:51 AM	SiCl4 MFC set to  0.000000
8/20/2011	11:26:51 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:26:51 AM	Tube furnace set to 0
8/20/2011	11:27:40 AM	Helium valve closed
8/20/2011	11:27:40 AM	H2 valve closed
8/20/2011	11:27:40 AM	BCl3 valve closed
8/20/2011	11:27:40 AM	PH3 valve closed
8/20/2011	11:27:40 AM	SiCl4 pre valve closed
8/20/2011	11:27:40 AM	SiCl4 post valve closed
8/20/2011	11:27:40 AM	Main Vac valve closed
8/20/2011	11:27:40 AM	Bubbler valve closed
8/20/2011	11:27:40 AM	Bypass valve opened
8/20/2011	11:27:40 AM	Helium MFC set to  0.000000
8/20/2011	11:27:40 AM	H2 MFC set to  0.000000
8/20/2011	11:27:40 AM	BCl3 MFC set to  0.000000
8/20/2011	11:27:40 AM	PHl3 MFC set to  0.000000
8/20/2011	11:27:40 AM	SiCl4 MFC set to  0.000000
8/20/2011	11:27:40 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:27:40 AM	Tube furnace set to 0
8/20/2011	11:29:40 AM	Helium valve closed
8/20/2011	11:29:40 AM	H2 valve closed
8/20/2011	11:29:40 AM	BCl3 valve closed
8/20/2011	11:29:40 AM	PH3 valve closed
8/20/2011	11:29:40 AM	SiCl4 pre valve closed
8/20/2011	11:29:40 AM	SiCl4 post valve closed
8/20/2011	11:29:40 AM	Bypass valve closed
8/20/2011	11:29:40 AM	Bubbler valve closed
8/20/2011	11:29:40 AM	Main Vac valve opened
8/20/2011	11:29:40 AM	Helium MFC set to  0.000000
8/20/2011	11:29:40 AM	H2 MFC set to  0.000000
8/20/2011	11:29:40 AM	BCl3 MFC set to  0.000000
8/20/2011	11:29:40 AM	PHl3 MFC set to  0.000000
8/20/2011	11:29:40 AM	SiCl4 MFC set to  0.000000
8/20/2011	11:29:40 AM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:29:40 AM	Tube furnace set to 0
8/20/2011	11:29:41 AM	Run finished at 11:29 AM
8/20/2011	9:56:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/20/2011	9:56:23 PM	Recipe started at 9:56 PM
8/20/2011	9:56:23 PM	Helium valve closed
8/20/2011	9:56:23 PM	H2 valve closed
8/20/2011	9:56:23 PM	BCl3 valve closed
8/20/2011	9:56:23 PM	PH3 valve closed
8/20/2011	9:56:23 PM	SiCl4 pre valve closed
8/20/2011	9:56:23 PM	SiCl4 post valve closed
8/20/2011	9:56:23 PM	Main Vac valve closed
8/20/2011	9:56:23 PM	Bypass valve closed
8/20/2011	9:56:23 PM	Bubbler valve closed
8/20/2011	9:56:23 PM	Helium MFC set to  0.000000
8/20/2011	9:56:23 PM	H2 MFC set to  0.000000
8/20/2011	9:56:23 PM	BCl3 MFC set to  0.000000
8/20/2011	9:56:23 PM	PHl3 MFC set to  0.000000
8/20/2011	9:56:23 PM	SiCl4 MFC set to  0.000000
8/20/2011	9:56:23 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:56:23 PM	Tube furnace set to 0
8/20/2011	9:56:23 PM	Run finished at 9:56 PM
8/20/2011	9:56:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/20/2011	9:56:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2011	9:56:40 PM	Recipe started at 9:56 PM
8/20/2011	9:56:40 PM	Helium valve closed
8/20/2011	9:56:40 PM	H2 valve closed
8/20/2011	9:56:40 PM	BCl3 valve closed
8/20/2011	9:56:40 PM	PH3 valve closed
8/20/2011	9:56:40 PM	SiCl4 pre valve closed
8/20/2011	9:56:40 PM	SiCl4 post valve closed
8/20/2011	9:56:40 PM	Main Vac valve closed
8/20/2011	9:56:40 PM	Bypass valve closed
8/20/2011	9:56:40 PM	Bubbler valve closed
8/20/2011	9:56:40 PM	Helium MFC set to  0.000000
8/20/2011	9:56:40 PM	H2 MFC set to  0.000000
8/20/2011	9:56:40 PM	BCl3 MFC set to  0.000000
8/20/2011	9:56:40 PM	PHl3 MFC set to  0.000000
8/20/2011	9:56:40 PM	SiCl4 MFC set to  0.000000
8/20/2011	9:56:40 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:56:40 PM	Tube furnace set to 0
8/20/2011	9:56:43 PM	H2 valve closed
8/20/2011	9:56:43 PM	BCl3 valve closed
8/20/2011	9:56:43 PM	PH3 valve closed
8/20/2011	9:56:43 PM	SiCl4 pre valve closed
8/20/2011	9:56:43 PM	SiCl4 post valve closed
8/20/2011	9:56:43 PM	Main Vac valve closed
8/20/2011	9:56:43 PM	Bypass valve closed
8/20/2011	9:56:43 PM	Bubbler valve closed
8/20/2011	9:56:43 PM	Helium valve opened
8/20/2011	9:56:43 PM	Helium MFC set to  500.000000
8/20/2011	9:56:43 PM	H2 MFC set to  0.000000
8/20/2011	9:56:43 PM	BCl3 MFC set to  0.000000
8/20/2011	9:56:43 PM	PHl3 MFC set to  0.000000
8/20/2011	9:56:43 PM	SiCl4 MFC set to  0.000000
8/20/2011	9:56:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:56:43 PM	Tube furnace set to 0
8/20/2011	9:57:48 PM	Helium valve closed
8/20/2011	9:57:48 PM	H2 valve closed
8/20/2011	9:57:48 PM	BCl3 valve closed
8/20/2011	9:57:48 PM	PH3 valve closed
8/20/2011	9:57:48 PM	SiCl4 pre valve closed
8/20/2011	9:57:48 PM	SiCl4 post valve closed
8/20/2011	9:57:48 PM	Main Vac valve closed
8/20/2011	9:57:48 PM	Bypass valve closed
8/20/2011	9:57:48 PM	Bubbler valve closed
8/20/2011	9:57:48 PM	Helium MFC set to  0.000000
8/20/2011	9:57:48 PM	H2 MFC set to  0.000000
8/20/2011	9:57:48 PM	BCl3 MFC set to  0.000000
8/20/2011	9:57:48 PM	PHl3 MFC set to  0.000000
8/20/2011	9:57:48 PM	SiCl4 MFC set to  0.000000
8/20/2011	9:57:48 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	9:57:48 PM	Tube furnace set to 0
8/20/2011	9:57:49 PM	Run finished at 9:57 PM
8/20/2011	9:57:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/20/2011	9:58:16 PM	Helium MFC set to  500.000000
8/20/2011	9:58:19 PM	Helium valve opened
8/20/2011	9:58:21 PM	Bubbler valve opened
8/20/2011	10:07:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/20/2011	10:07:51 PM	Recipe started at 10:07 PM
8/20/2011	10:07:51 PM	Helium valve closed
8/20/2011	10:07:51 PM	H2 valve closed
8/20/2011	10:07:51 PM	BCl3 valve closed
8/20/2011	10:07:51 PM	PH3 valve closed
8/20/2011	10:07:51 PM	SiCl4 pre valve closed
8/20/2011	10:07:51 PM	SiCl4 post valve closed
8/20/2011	10:07:51 PM	Main Vac valve closed
8/20/2011	10:07:51 PM	Bypass valve closed
8/20/2011	10:07:51 PM	Bubbler valve closed
8/20/2011	10:07:51 PM	Helium MFC set to  0.000000
8/20/2011	10:07:51 PM	H2 MFC set to  0.000000
8/20/2011	10:07:51 PM	BCl3 MFC set to  0.000000
8/20/2011	10:07:51 PM	PHl3 MFC set to  0.000000
8/20/2011	10:07:51 PM	SiCl4 MFC set to  0.000000
8/20/2011	10:07:51 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:07:51 PM	Tube furnace set to 0
8/20/2011	10:07:51 PM	Run finished at 10:07 PM
8/20/2011	10:07:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/20/2011	10:07:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2011	10:08:00 PM	Recipe started at 10:07 PM
8/20/2011	10:08:00 PM	Helium valve closed
8/20/2011	10:08:00 PM	H2 valve closed
8/20/2011	10:08:00 PM	BCl3 valve closed
8/20/2011	10:08:00 PM	PH3 valve closed
8/20/2011	10:08:00 PM	SiCl4 pre valve closed
8/20/2011	10:08:00 PM	SiCl4 post valve closed
8/20/2011	10:08:00 PM	Main Vac valve closed
8/20/2011	10:08:00 PM	Bubbler valve closed
8/20/2011	10:08:00 PM	Bypass valve opened
8/20/2011	10:08:00 PM	Helium MFC set to  0.000000
8/20/2011	10:08:00 PM	H2 MFC set to  0.000000
8/20/2011	10:08:00 PM	BCl3 MFC set to  0.000000
8/20/2011	10:08:00 PM	PHl3 MFC set to  0.000000
8/20/2011	10:08:00 PM	SiCl4 MFC set to  0.000000
8/20/2011	10:08:00 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:08:00 PM	Tube furnace set to 0
8/20/2011	10:08:59 PM	Helium valve closed
8/20/2011	10:08:59 PM	H2 valve closed
8/20/2011	10:08:59 PM	BCl3 valve closed
8/20/2011	10:08:59 PM	PH3 valve closed
8/20/2011	10:08:59 PM	SiCl4 pre valve closed
8/20/2011	10:08:59 PM	SiCl4 post valve closed
8/20/2011	10:08:59 PM	Main Vac valve closed
8/20/2011	10:08:59 PM	Bubbler valve closed
8/20/2011	10:08:59 PM	Bypass valve opened
8/20/2011	10:08:59 PM	Helium MFC set to  0.000000
8/20/2011	10:08:59 PM	H2 MFC set to  0.000000
8/20/2011	10:08:59 PM	BCl3 MFC set to  0.000000
8/20/2011	10:08:59 PM	PHl3 MFC set to  0.000000
8/20/2011	10:08:59 PM	SiCl4 MFC set to  0.000000
8/20/2011	10:08:59 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:08:59 PM	Tube furnace set to 0
8/20/2011	10:09:59 PM	Helium valve closed
8/20/2011	10:09:59 PM	H2 valve closed
8/20/2011	10:09:59 PM	BCl3 valve closed
8/20/2011	10:09:59 PM	PH3 valve closed
8/20/2011	10:09:59 PM	SiCl4 pre valve closed
8/20/2011	10:09:59 PM	SiCl4 post valve closed
8/20/2011	10:09:59 PM	Bypass valve closed
8/20/2011	10:09:59 PM	Bubbler valve closed
8/20/2011	10:09:59 PM	Main Vac valve opened
8/20/2011	10:09:59 PM	Helium MFC set to  0.000000
8/20/2011	10:09:59 PM	H2 MFC set to  0.000000
8/20/2011	10:09:59 PM	BCl3 MFC set to  0.000000
8/20/2011	10:09:59 PM	PHl3 MFC set to  0.000000
8/20/2011	10:09:59 PM	SiCl4 MFC set to  0.000000
8/20/2011	10:09:59 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	10:09:59 PM	Tube furnace set to 0
8/20/2011	10:10:00 PM	Run finished at 10:10 PM
8/20/2011	10:10:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/20/2011	10:29:19 PM	Main Vac valve closed
8/20/2011	10:29:25 PM	Main Vac valve opened
8/20/2011	11:07:08 PM	Main Vac valve closed
8/20/2011	11:07:27 PM	Main Vac valve opened
8/20/2011	11:07:52 PM	Tube furnace set to 120
8/20/2011	11:11:47 PM	Main Vac valve closed
8/20/2011	11:12:06 PM	Main Vac valve opened
8/20/2011	11:12:35 PM	Recipe started at 11:12 PM
8/20/2011	11:12:35 PM	Helium valve closed
8/20/2011	11:12:35 PM	H2 valve closed
8/20/2011	11:12:35 PM	BCl3 valve closed
8/20/2011	11:12:35 PM	PH3 valve closed
8/20/2011	11:12:35 PM	SiCl4 pre valve closed
8/20/2011	11:12:35 PM	SiCl4 post valve closed
8/20/2011	11:12:35 PM	Main Vac valve closed
8/20/2011	11:12:35 PM	Bypass valve closed
8/20/2011	11:12:35 PM	Bubbler valve closed
8/20/2011	11:12:35 PM	Helium MFC set to  0.000000
8/20/2011	11:12:35 PM	H2 MFC set to  0.000000
8/20/2011	11:12:35 PM	BCl3 MFC set to  0.000000
8/20/2011	11:12:35 PM	PHl3 MFC set to  0.000000
8/20/2011	11:12:35 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:12:35 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:12:35 PM	Tube furnace set to 0
8/20/2011	11:12:39 PM	Helium valve closed
8/20/2011	11:12:39 PM	BCl3 valve closed
8/20/2011	11:12:39 PM	PH3 valve closed
8/20/2011	11:12:39 PM	SiCl4 pre valve closed
8/20/2011	11:12:39 PM	SiCl4 post valve closed
8/20/2011	11:12:39 PM	Main Vac valve closed
8/20/2011	11:12:39 PM	Bypass valve closed
8/20/2011	11:12:39 PM	Bubbler valve closed
8/20/2011	11:12:39 PM	H2 valve opened
8/20/2011	11:12:39 PM	Helium MFC set to  0.000000
8/20/2011	11:12:39 PM	H2 MFC set to  500.000000
8/20/2011	11:12:39 PM	BCl3 MFC set to  0.000000
8/20/2011	11:12:39 PM	PHl3 MFC set to  0.000000
8/20/2011	11:12:39 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:12:39 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:12:39 PM	Tube furnace set to 0
8/20/2011	11:13:42 PM	Helium valve closed
8/20/2011	11:13:42 PM	BCl3 valve closed
8/20/2011	11:13:42 PM	PH3 valve closed
8/20/2011	11:13:42 PM	SiCl4 pre valve closed
8/20/2011	11:13:42 PM	SiCl4 post valve closed
8/20/2011	11:13:42 PM	Main Vac valve closed
8/20/2011	11:13:42 PM	Bypass valve closed
8/20/2011	11:13:42 PM	H2 valve opened
8/20/2011	11:13:42 PM	Bubbler valve opened
8/20/2011	11:13:42 PM	Helium MFC set to  0.000000
8/20/2011	11:13:42 PM	H2 MFC set to  500.000000
8/20/2011	11:13:42 PM	BCl3 MFC set to  0.000000
8/20/2011	11:13:42 PM	PHl3 MFC set to  0.000000
8/20/2011	11:13:42 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:13:42 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:13:42 PM	Tube furnace set to 0
8/20/2011	11:13:43 PM	Helium valve closed
8/20/2011	11:13:43 PM	BCl3 valve closed
8/20/2011	11:13:43 PM	PH3 valve closed
8/20/2011	11:13:43 PM	SiCl4 pre valve closed
8/20/2011	11:13:43 PM	SiCl4 post valve closed
8/20/2011	11:13:43 PM	Main Vac valve closed
8/20/2011	11:13:43 PM	Bypass valve closed
8/20/2011	11:13:43 PM	H2 valve opened
8/20/2011	11:13:43 PM	Bubbler valve opened
8/20/2011	11:13:43 PM	Helium MFC set to  0.000000
8/20/2011	11:13:43 PM	H2 MFC set to  500.000000
8/20/2011	11:13:43 PM	BCl3 MFC set to  0.000000
8/20/2011	11:13:43 PM	PHl3 MFC set to  0.000000
8/20/2011	11:13:43 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:13:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:13:43 PM	Tube furnace set to 1000
8/20/2011	11:38:43 PM	Helium valve closed
8/20/2011	11:38:43 PM	PH3 valve closed
8/20/2011	11:38:43 PM	Main Vac valve closed
8/20/2011	11:38:43 PM	Bypass valve closed
8/20/2011	11:38:43 PM	H2 valve opened
8/20/2011	11:38:43 PM	BCl3 valve opened
8/20/2011	11:38:43 PM	SiCl4 pre valve opened
8/20/2011	11:38:43 PM	SiCl4 post valve opened
8/20/2011	11:38:43 PM	Bubbler valve opened
8/20/2011	11:38:43 PM	Helium MFC set to  0.000000
8/20/2011	11:38:43 PM	H2 MFC set to  500.000000
8/20/2011	11:38:43 PM	BCl3 MFC set to  2.500000
8/20/2011	11:38:43 PM	PHl3 MFC set to  0.000000
8/20/2011	11:38:43 PM	SiCl4 MFC set to  50.000000
8/20/2011	11:38:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:38:43 PM	Tube furnace set to 1000
8/20/2011	11:52:43 PM	Helium valve closed
8/20/2011	11:52:43 PM	BCl3 valve closed
8/20/2011	11:52:43 PM	PH3 valve closed
8/20/2011	11:52:43 PM	SiCl4 pre valve closed
8/20/2011	11:52:43 PM	SiCl4 post valve closed
8/20/2011	11:52:43 PM	Main Vac valve closed
8/20/2011	11:52:43 PM	Bypass valve closed
8/20/2011	11:52:43 PM	H2 valve opened
8/20/2011	11:52:43 PM	Bubbler valve opened
8/20/2011	11:52:43 PM	Helium MFC set to  0.000000
8/20/2011	11:52:43 PM	H2 MFC set to  500.000000
8/20/2011	11:52:43 PM	BCl3 MFC set to  0.000000
8/20/2011	11:52:43 PM	PHl3 MFC set to  0.000000
8/20/2011	11:52:43 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:52:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:52:43 PM	Tube furnace set to 750
8/20/2011	11:57:43 PM	H2 valve closed
8/20/2011	11:57:43 PM	BCl3 valve closed
8/20/2011	11:57:43 PM	PH3 valve closed
8/20/2011	11:57:43 PM	SiCl4 pre valve closed
8/20/2011	11:57:43 PM	SiCl4 post valve closed
8/20/2011	11:57:43 PM	Main Vac valve closed
8/20/2011	11:57:43 PM	Bypass valve closed
8/20/2011	11:57:43 PM	Helium valve opened
8/20/2011	11:57:43 PM	Bubbler valve opened
8/20/2011	11:57:43 PM	Helium MFC set to  500.000000
8/20/2011	11:57:43 PM	H2 MFC set to  0.000000
8/20/2011	11:57:43 PM	BCl3 MFC set to  0.000000
8/20/2011	11:57:43 PM	PHl3 MFC set to  0.000000
8/20/2011	11:57:43 PM	SiCl4 MFC set to  0.000000
8/20/2011	11:57:43 PM	Bypass solenoid MFC set to  0.000000
8/20/2011	11:57:44 PM	Tube furnace set to 0
